Message-Id: <3329497C.41C6@fujita3.iis.u-tokyo.ac.jp>
Dear MEMS colleagues
Does anyone work on the viscoelastic behavior of polysilicon beams at
high temperature? Thanks for your help.
E. Yang
Institute of Industrial Science,
The Univ. of Tokyo, 7-22-1 Roppongi, Minato-ku, Tokyo 106, Japan
TEL. +81-3-3402-6231(ext.2354), FAX. +81-3-3402-5078
E-mail ehyang@fujita3.iis.u-tokyo.ac.jp
http://www.fujita3.iis.u-tokyo.ac.jp/~ehyang/yang.html