Hi Marie,
We have made some work on this subject using ICP reactor and SF6 chemistry:
http://cmi.epfl.ch/etch/MEMS03.pdf
Regards,
Cyrille.
-----Original Message-----
From: mems-talk-bounces+cyrille.hibert=nmrc.ie@memsnet.org
[mailto:mems-talk-bounces+cyrille.hibert=nmrc.ie@memsnet.org]On Behalf
Of Tripp, Marie Kathleen
Sent: 18 February 2004 14:45
To: mems-talk@memsnet.org
Subject: [mems-talk] Alumina safe isotropic Silicon etchant
Hello, I am looking for an etchant (either wet or dry) that will isotropic
etch Silicon but not affect Alumina (Al22O3, Alumina Oxide). Can anyone
recommend anything other than XeF2? Thanks, Marie
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