Aasutosh,
If you are sputtering with a partial pressure of N2 you could change some of the
Ti to TiN at the surface - you might want to try using a thin protective layer.
Thanks,
Greg Miller
KVH Industries
Email: gmiller@kvh.com
-----Original Message-----
From: aasutosh dave [mailto:aasutosh@msn.com]
Sent: Friday, February 27, 2004 2:45 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] Resistance for Ti
Hello,
I am having problem with Ti resistance bellow thick nitride. The Ti arms
are 0.16 um thick and open at edges.Silicon nitride is then sputtered ~ 1um
on top of it. Does the thick nitride deposition on top of Ti affect its
resistance or affect its charateristic? The Ti arm lenght is ~ 200 um.
Thanks,
Aasutosh Dave
NanoFab Center
Arlington, Texas
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