What's ito?
-----Message d'origine-----
De : jo ed [mailto:phdjbe@yahoo.com]
Envoyé : mardi 2 mars 2004 13:15
À : mems-talk@memsnet.org
Objet : [mems-talk] oxide wet etch on ito
Hello
I have a substrate coated with ito followed by oxide.
Does anyone know of a selective wet etch process to
remove the oxide put keep the ito?
cheers,
Jo
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