I also try to use deposited silicon to etch glass. I don't know if it works.
Lanzy
----- Original Message -----
From: "Isa Kiyat"
To: "General MEMS discussion"
Sent: Thursday, March 11, 2004 4:26 PM
Subject: [mems-talk] 10 um SiO2 etch?
> Nowadays, I am trying to etch 10 um thermal SiO2 using both HF and RIE.
Can
> anyone suggest a recipe for RIE and possible hard mask material. We tried
> sputtered Si but it failed.
> Thanks.
> =================================
>
> Isa Kiyat
>
>
>
>
>
>