Hello,
I am trying to pattern gold onto alumina substrate. I plan to use Ti as my
adhesion layer. Is there a special cleaning method or other
protocols(plasma, ultrasonic?) in order to have good adhesion? At this
point, I am assuming piranha will be able to clean the organics off the
substrate and evaporation will do the job.
Please advise any reference and/or recipes.
Thank you!
CK