Dear Mr. Nagle,
I read your post on [mems-talk] regarding Pt annealing. I will anneal Pt
(99.997%) at various temperatures and times, and could use some help on those
two variables. Do you have any recommendations on where to find a good
reference. Thank you for your time.
Sincerely,
Ilan Gluzman
"Grain growth of the as-deposited Pt columns was observed after annealing at 650
degrees C, and extensive changes in the Pt microstructure were apparent
following a 750 degrees C anneal for 20 min. In addition, two types of defects
were identified on the surfaces of annealed substrates."
http://mail.mems-exchange.org/pipermail/mems-talk/2003-December/011868.html