Is that Pyrex 7740?
What happens to the non-volatile reaction products like AlF3?
Are they sputtered off?
--Kirt Williams
----- Original Message -----
From: "Shile"
To: ; "'General MEMS discussion'"
Sent: Monday, March 15, 2004 9:24 AM
Subject: RE: [mems-talk] Anisotropic etching in Pyrex glass
> For anisotropic Pyrex etch use SF6 RIE. It's a bit slow, but ~5 microns
> is easy to achieve in a capacitivly coupled etcher using a metal mask.
> Etching Pyrex to a depth of several hundred microns has been achieved
> with ICP systems.
>
> Roger Shile