--On Monday, March 22, 2004 3:12 PM -0800 Phillipe Tabada
wrote:
> Hi Yonduck
>
> You can use the STS to deposit a teflon like layer to help you peel PDMS
> off the substrate. Usually a two minute run of only passivation gases
> using
> the standard recipe should be sufficient for your needs. The layer should
> last you for about 5-10 runs before you need to remove the layer and
> redeposit the coat. You also need to recondition the STS chamber after
> you
> run this process.
Phil,
Are you certain about this? I have tried this myself using the CMU Nanofab
STS, and I was not impressed by the performance of that passivation layer
as a release agent. I found that I got much better performance by coating
my molds with a fluorosilane from United Chemical Technologies (put a few
drops in a vial, put vial and molds in standard lab dessicator and connect
to house vacuum, wait an hour or two).
Alik Widge
Doctoral Student
MEMS Laboratory
Carnegie Mellon University