Hello Tomi
I suppose some kind of arcing may be there in your system whil
sputtering Aluminium. Possibly some contamination or gap between target
and substrate. So you need to look for that matter also.
At what pressure/volatge you are working?
hope it will help u.
good luck
kamal
Kamal Kishore Phone :(0172) 2237401 to 10
Engineer,VLSI:FAB Ext:576,550,570,441
Semiconductor Complex Limited. Fax:(0172)-2236378,2236885
Sector 72(Indl.Area),S A S Nagar,
Mohali, Punjab- 160071
On Mon, 5 Apr 2004 mems-talk-request@memsnet.org wrote:
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