Hi,
I am tring to model the exposure behavior of a negtive resist. I have some
experience of modeling positive resist using the absorbing-bleaching
relationships. However, I found very limit information of modeling
negative resist in several text books. I am wondering if anyone can
suggest some literatures on this to me.
Peng Yao
DOEs lab
Electrical Engineering Dept.
Univeristy of delaware
Newark D.E 19716