Hi Everybody,
I need a help regarding the derivation of the formula of the spring
constant for an open end folded beam flexure. The formula is:
kx=2Etw^3/l^3
where E=young's modulus of polysilicon,
t=Polysilicon thickness
w=Width of flexure beam
l=length of flexure beam
Can anyone suggest me the books/references where I can find the derivation of
the particular formula.
Thanks in advance.
KANISHKA BISWAS
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