Hello MEMS group
I was wondering if there is any photosensitive glass (similar to FOTURAN)
that has a TCE close to that of Silicon, so that the two could be bonded
together anodically.
I need to bond structured glass with silicon, but find wet etch of Pyrex
glass rather difficult. I am trying to avoid the possibility of
ultrasonic drilling of pyrex, and would be happy to buy photosensitive
glass that is also bondable with silicon.
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Thank You,
Sriram
MEMS Development and Engg.,
Bharat Electronics
Bangalore, India