Hi All,
For an ultrasonic transducer I need to dice 0.5mm thick PZT plates. We have
K-S 7100 dicing saw.
I used to partially cut PZT (less than 0.5mm) using basically a silicon
blade (S1235) at 0.5 inch/sec cutting speed, smoothly without any problem.
Now I am trying to cut all the way through PZT bonded on a silicon die
(using super glue). So I am after slightly cutting into silicon. The
problem, however is that diced PZT pieces do not remain intact, and gets
detached from silicon.
The problem I think is mostly due to weakness of the bond between PZT and
silicon.
On the other hand, I am still wondering if I am cutting too fast and
shearing the pieces more than enough. I appreciate if anyone can share
his/her experience on this issue or recommend me a suitable dicing recipe
(blade type, cutting speed and RPM speed of the blade) for PZT?
Thanks
Serhan Ardanuc
Cornell University
_________________________________________________________________
MSN 8 with e-mail virus protection service: 2 months FREE*
http://join.msn.com/?page=features/virus