Need some suggestion about Ti and TiN sputtering
process (Wi Li)
MT Klaus Beschorner
2004-05-27
> We need suggestion from you about Ti and TiN process.
Hi ,
it would pobably help your cause to tell us which machine you use.
Depending on the setup and post-processing, single chamber Ti/TiN
is possible, and used in the CMOS semicunductor industry.
best regards,
klaus
Klaus Beschorner
Metron Technology Europe, PVD (Eclipse) Process Manager