Hi,
We want to blanket-etch a thin PDMS layer (1~2um thick) with
CF4/O2 plasma. Can anyone suggest a suitable gas mixture,
power, pressure and also the associated etch rate?
Thanks a lot!
Jun
*******************************************
Jun Zou
319B Micro and Nanotechnology Lab
University of Illinois at Urbana-Chamapaign
208 N. Wright St.
Urbana, IL 61801
Phone: (217)265-0808
Fax: (217)244-6375
*******************************************