Dear MEMS experts,
I am relatively new to this discussion group and noticed that you
work a lot with PDMS. May I ask your help with regards to achieving thin
layers of PDMS on wafer?
We would like to spin coat a PDMS (RTV 615 from General Electric) layer of
1um or less onto a 4-inch wafer. Would you be able to suggest a solvent
ratio or spin recipe for this?
Thank you kindly,
Andrew Fung