A technique I've used to overcome poor adhesion of photoresist to Pyrex
is to first put down a layer of chrome. This is kind of a brute force
last alternative if HMDS prime doesn't give adequate adhesion.
Roger Shile
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org] On Behalf Of Lee, Duhyun
Sent: Friday, July 16, 2004 5:58 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] AZ1512 adhesion on quartz wafer
Dear MEMS talkers,
I'm trying to pattern 5um-width lines with AZ1512 and lift-off process
on the quratz wafer.
But the resist dose not have good adhesion.
What factors do I have to consider and how can I handle those factors?
pre-cleaning? baking? or...
Lee, Duhyun
========================================
duhyun@skku.edu
Technology Innovation Center(TIC)
Dep. of Advanced Materials Eng.
Sungkyunkwan University, KOREA
Tel +82-31-290-5645
Fax +82-31-290-5644
========================================
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