Hi,
I want to implant phosphorous in boron implanted silicon (p type).
Intellisense doesn't seem to allow implantation on a pre-implanted
material. I can't even etch the latter. I don't want to go the long way by
adding a mask and making pits. Any way out ?
(seems there are roadblocks just everywhere you go!)
thanks,
Sudhanshu
India
~*~