Tracy,
How are you putting your thin teflon films down? We have a
plasma process we do that gives good adhesion.
David
ACT MicroDevices, Inc.
Tracy E. Bell wrote:
> Can anyone suggest a method for improving
> the adhesion of thin Teflon films to silicon
> and/or oxide?
>
> Thanks in advance,
>
> Tracy Bell
> University of Michigan
>
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