Hi Tan
Normally a thermocouple is located near to the substrate holder in
the evaporation system.This shows not the actual temp of substarte but is
close enough.
Kamal Kishore Phone :(0172) 2237401 to 10
Engineer,VLSI:FAB Ext:576,550,570,441
Semiconductor Complex Limited. Fax:(0172)-2236378,2236885
Sector 72(Indl.Area),S A S Nagar,
Mohali, Punjab- 160071
On Wed, 4 Aug 2004 mems-talk-request@memsnet.org wrote:
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