MEMS-talk Digest suggestion needed on femto pf
measurements...
rp
2004-08-17
dear associates!
all the mems group.
we are the system integrators for different applcations on mems.
we are at job now to;
1. devise an electonics signal conditioning circuit for mems sensor with output
of 5pf + - femto pf sensitivity.
2. make the measurements of incremental pf on the sensor.
we understand that a synchronous demodulation technique is needed so as to
increase the noise immunity.
we welcome any suggestions, equipment available, procedures.
regards
rpsoni
dixtinct_rp@yahoo.ca
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Subject: MEMS-talk Digest, Vol 22, Issue 16
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Today's Topics:
1. Re: refractive index measurement of thick films (Kamal Yadav)
2. Piezoelectric Beam Simulation by using Ansys (Siripon Sukuabol)
3. Removal of reflowed AZ resist (Erik Jung)
4. Double depth SU-8 (Matthew Davies)
----------------------------------------------------------------------
Message: 1
Date: Sun, 15 Aug 2004 12:48:11 -0500
From: Kamal Yadav
Subject: Re: [mems-talk] refractive index measurement of thick films
To: sxy154@psu.edu, General MEMS discussion
Message-ID: <22d08e9604081510487245226f@mail.gmail.com>
Content-Type: text/plain; charset=US-ASCII
Hi,
I am a optics student. Brewster's angle measurement is also a good
reliable technique in measuring the index. I have done it very
recently. At brewster's angle your reflected power goes to almost
zero. Input light should be TM polarized i.e horizontle polarized.
regards,
kamal
On Sat, 14 Aug 2004 21:22:45 -0400, sxy154 wrote:
> Hello Xianling
> You might want to try prism coupling technique to measure the refractive
> index of film. The basic assumption of this method is you already know exact
> thickness of film. Even thought, this technique is widely used for thin film
> rather than thick film, I don't see any restriction in thickness range.
>
> Good Luck
>
> Sung
>
>
>
> -----Original Message-----
> From: X Chen [mailto:xianling@gpu.srv.ualberta.ca]
> Sent: Friday, August 13, 2004 7:12 PM
> To: mems-talk@memsnet.org
> Subject: [mems-talk] refractive index measurement of thick films
>
> Hello MEMS talkers,
>
> Does anyone know a way to measure refractive index of thick films? I used
> spectrophotometer to measure the VIS spectral transmission of 50 micron
> SU-8 on Borofloat wafer. However, the transmittance modulation is just too
> weak for reliable index fitting. With a large film thickness, light
> coherence is lost due to finite bandwidth and surface vaiation. Reducing
> film thickness to a few microns using SU-8 thinner will solve this problem
> but I doubt the index will be different. I need to have a precise
> dispersion curve (index vs. wavelength) for optical devices. The index
> mentioned in publised papers varies greatly and is available only for a
> few individual wavelengths. This index variation could be caused by
> different processing conditions. Therefore, the index should ideally be
> measured for my own process. But I would appreciate if someone can give me
> a dispersion curve for SU-8 in VIS-NIR range.
>
> Best regards,
>
> Xianling Chen
>
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>
--
"Its better to lose your pride for someone you love,
than to lose that someone you love for your useless pride"
"Whether it happens in a hundred years or a thousand years or a
million years, eventually our sun will grow cold and go out. When that
happens, it won't just take us. It'll take Marilyn Monroe and Lao-Tzu
and Einstein and Morobuto and Buddy Holly and Aristophanes... and all
of this... all of this was for nothing, unless we go to the stars. -
Commander Sinclair, "Infection" "
Kamal Yadav
Graduate Student
Rose Hulman Institute of Technology
Terre Haute
Indiana 47803
------------------------------
Message: 2
Date: Sun, 15 Aug 2004 23:33:08 -0700 (PDT)
From: Siripon Sukuabol
Subject: [mems-talk] Piezoelectric Beam Simulation by using Ansys
To: mems-talk@memsnet.org
Message-ID: <20040816063308.46774.qmail@web50801.mail.yahoo.com>
Content-Type: text/plain; charset=us-ascii
Hi..All;
Please give me your advices.
Does anyone know where I can find/get the
examples/tutorials of piezoelectric beam simulation by
using Ansys software?
Thanks for your kindness.
Siripon
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------------------------------
Message: 3
Date: Mon, 16 Aug 2004 11:25:53 +0200
From: "Erik Jung"
Subject: [mems-talk] Removal of reflowed AZ resist
To: "General MEMS discussion"
Message-ID:
Content-Type: text/plain; charset="us-ascii"
Dear all,
anyone of you has experience in completely removing AZ photoresist after
reflowing SnAg solder in the openings (Tmax~230?C, t@Tmax ~ 40sec)
Thank you!
Erik
TU Berlin
------------------------------
Message: 4
Date: Mon, 16 Aug 2004 15:22:11 +0100
From: "Matthew Davies"
Subject: [mems-talk] Double depth SU-8
To:
Message-ID: <001d01c4839c$6bec94a0$ec8cc593@bagger>
Content-Type: text/plain; charset="Windows-1252"
Hi all
I'm trying to find out if there is an easy method for seeing developed
SU-8 through another layer of SU-8. We are trying to make devices
requiring double depth processing and the aligning of the photomask for
the second layer is very difficult as we are currently unable to see the
developed SU-8 on the bottom layer. At the moment we need to
overdevelop the bottom SU-8 layer until cracks appear at which point we
can see the cracks through the top layer of SU-8.
Any suggestions would be much appreciated.
Thanks all
Matt Davies
STRC, University of Hertfordshire
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