The color of poly or amorphous silicon deposited PECVD?
Jinkee Lee
2004-08-31
Hi all,
I deposited Si on glass using PECVD, but I am wondering it is really Si or
Si nitride.
Our Silane source is 2% SiH4 mixed with N2. So, I supplied SiH4 and N2.
With my deposition, the color was yellow with thin layer and getting red
with thick layer.
If someone has a same experience, please let me know.
Thanks
Jinkee Lee
Brown Univeristy, Division of Engineering
Ph.D. student@Microfluidics Lab, Tripathi Group.