Hi Raegan,
Try [1g KOH: 10g K3Fe(CN)6: 100ml DI water]. I believe this is what we used
at Berkeley to etch Al without attacking ZnO. You might search on
http://microlab.berkeley.edu for more details. Another option might be to
use lift-off instead of etch. Good luck.
Marc Straub, Engineering Design Manager
Solidus Technologies, Inc.
Colorado Springs, CO USA
-----Original Message-----
From: Raegan Johnson [mailto:johnso45@iastate.edu]
Sent: Sunday, August 29, 2004 12:51 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] wet etch that etches Al but not ZnO
Does anyone know of a wet etch solution that will etch aluminum but not ZnO?
thanks,
Raegan