A number of questions about etching ITO. Why not lift off which is easy? Bill
Moffat
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of Shelegeda Evgeny
Sent: Tuesday, August 31, 2004 6:41 AM
To: mems-talk@memsnet.org
Subject: [mems-talk] ITO etchat wich is selective to Aluminium
I need to etch ITO thin films in a photolithography process of
fabricating a semiconductor device.
The main task of this photolithography process is to etch ITO film but
not to etch an Al film which is under the ITO film.
So I need the ITO etchant which is highly selective to Al.
Best regards,
Shelegeda Eugenie
Research Assistant
P.N. Lebedev Physical Institute
Moscow, Russia
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