How to make this kind of thick mold?
Is that the procedures similar to normal case? ( like spin coating
>>softbake >> uv exposure >> hard bake >> develope.....)
And what kind of su-8 should i choose? su-2000?
What is the meaning of multi spinning programme?
"With a multi spinning program, we have patterned in one exposure a
1200 µm and a 2300 µm layer, which is, to our knowledge, the thickest
structure ever patterned using microfabrication techniques." by IBM
( http://dmtwww.epfl.ch/ims/micsys/projects/su8/epon.html )
Does anyone make a such thick mold before?
Can you share your experience?
Any of suggestions and advice are valuable to me.
thanks in advance.