Hello folks
I am trying to fabricate an acceleration sensor. I intend to use
force balance feed back to maintain constant tunneling current thus
avoiding any non-linearity. Force balance electrode will be in a shallow
pit of about 1000 to 1500 A.
My doubt is, after etching the pit and subsequently on removal of
masking oxide will the pit and allignment marks be so visible so as to
allign the next mask? Any suggestion is wellcome.
Thanking you guys in advance.
regards
choudhary
******************************************************************************
Sqr Ldr N K Choudhary Residential Address.
M.Tech (II).Electrical Engg. Flat No 304, DRDO Bldg
Microelectronics. IIT POWAI
IIT Powai.
Bombay- 400 076.
Tel: 578 3655 Bombay- 400 076.
email:
******************************************************************************