Hi Friends
I need to deposit Platinum through E- Beam Evaporation for some of
our MEMS application. Can Anybody suggest what kind of beam sweep pattern
is suitable for platinum evaporation? and Why?
I am using 7KW e beam power.
Regards
Kamal Kishore Phone :(0172) 2237401 to 10
Engineer,VLSI:FAB Ext:576,550,570,441
Semiconductor Complex Limited. Fax:(0172)-2236378,2236885
Sector 72(Indl.Area),S A S Nagar,
Mohali, Punjab- 160071