How about Nickle Chromium (NiCr)? It can be sputtered, and is resistive. I
don't know if it's compatible with your process or needs, but the material
properties can be found online at a variety of places.
David Nemeth
Senior Engineer
Sophia Wireless, Inc.
14225-C Sullyfield Circle
Chantilly, VA
Ph: (703) 961-9573 x206
Fax:(703) 961-9576
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of Sebastian Sosin
Sent: Friday, October 15, 2004 4:02 AM
To: mems-talk@memsnet.org
Subject: SPAM-LOW: [mems-talk] metallic microhotplate
I have to make a heater but there is a problem: it must be made of some
metal, not of polysilicon, and the metal shouldn't be Platinum. The max
temperature is 450-500 Celsius.
What metal can I use?
_______________________________________________
MEMS-talk@memsnet.org mailing list: to unsubscribe or change your list
options, visit http://mail.mems-exchange.org/mailman/listinfo/mems-talk
Hosted by the MEMS Exchange, providers of MEMS processing services.
Visit us at http://www.memsnet.org/