Hi Nibras,
If you contact www.clariant.com they will give you the process sheet of the
resist .
Virginia Soares
INESC - Microsistemas e Nanotecnologias
R.Alves Redol,9
1000-029 LISBOA
PORTUGAL
email:vsoares@inesc-mn.pt
Tel: +351 21 3100 300 ext.2504
Fax :+351 21 314 58 43
----- Original Message -----
From: "Nibras Sahib Awaja"
To:
Sent: Tuesday, October 26, 2004 2:10 AM
Subject: [mems-talk] AZ4620 information
Dear all,
I am working with AZ4620 positive photo resist. Could anyone kindly tell me
what are the spin speed, spin time, exposure time and the exposure energy
required for AZ4620. How can I measure the thickness of the AZ4620.
I really appreciate your help.
Thanks,
Nibras
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