Problem of doing lift-off with PMMA and
AluminumOxide...
William Lanford-Crick
2004-11-02
You can try warm "PG" (Microchem Corp) which is essentially NMP. We use a
1:1 mixture of Methylene Chloride : Methanol for stripping PMMA, and find
that it works much better than acetone.
Bill
-----Original Message-----
From: mems-talk-bounces@memsnet.org
[mailto:mems-talk-bounces@memsnet.org]On Behalf Of jchuang@bu.edu
Sent: Monday, November 01, 2004 5:14 PM
To: mems-talk@memsnet.org
Subject: [mems-talk] Problem of doing lift-off with PMMA and
AluminumOxide...
Hi All,
I try to pattern my sample on the PMMA950K(500nm) and deposite Al2O3(300nm)
then do the lift-off. But after put in warm acetone for 30MIN, non-thing be
lift-off. Al2O3 is still all over my sample. Do anyone know how to lift-off
the Al2O3? Thanks.
Chien-Chih Huang(Jeff)
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