Pradeep,
William Trimmer edited a book:
Micromechanics and MEMS : Classic and Seminal Papers to 1990
by William S. Trimmer (Editor)
Hope this helps,
Loren St. Clair
FormFactor, Inc.
2140 Research Dr.
Livermore, CA 94550
Phone: 925-243-3556
Fax: 925-456-3900
Cell: 925-525-4796
-----Original Message-----
From: mems-talk-bounces@memsnet.org [mailto:mems-talk-bounces@memsnet.org] On
Behalf Of Pradeep Dixit
Sent: Tuesday, November 16, 2004 1:16 AM
To: MEMS-talk@memsnet.org
Subject: [mems-talk] Need Classic papers on MEMS
Dear All,
I am looking for a classic technical paper on MEMS.
1. " Anisotropic etching of Silicon" by K.E.Bean, IEEE transaction on
Electron Device, Vol ED-25, pp- 1185-1193, Oct 1978.
2. "Silicon as Mechanical Material" , K. E. Petersen, Proceedings of
IEEE, vol. 70, no. 5, pp. 420-457, May 1982.
The above papers are very famous and i am sure every body must have
seen them. I will be thankful to you if some body forward me these
papers.
Thanks,
Pradeep Dixit
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