Doug,
Put the baffle / buffer wafers in mesa etc (e.g. 75% HF, 22% HNO3, 3%
acetic acid, highest concentrations of all of the above you can get).
Also, for quartz baffles in a poly furnace generally, I've found that
a few hours or an overnight soak in straight HF will work to clear
very thick layers.
-Eric Woods
> ---------- Forwarded message ----------
> From: "Doug Stewart"
> To:
> Date: Tue, 30 Nov 2004 12:57:02 -0500
> Subject: [mems-talk] method for bulk poly removal
> I am looking for a way to strip many, many microns of poly off of
> furnace baffle wafers. Does anyone know a faster method than standard
> (wet) poly etch?
>
> Doug Stewart
>