Which kind of metal film will not be attacked or
relatively much slower etched in TMAH
Kevin Duan
2004-12-13
As subject.
I want to have a patterned metal film on silicon wafer, and don't want
the film be etched during the wet etching in TMAH.
Does anyone know which kind of metal can survive in TMAH? I know
someone has succeeded in not attacking aluminum in TMAH. But that
needs some additives, and with limited success. So could you give
some suggestion?
Thanks very much.