I am attempting to spin AZP4620 at ~10um. I have used many variations
on the manufacturer's specified recipe for a 10um coat. After the
prebake the uniformity is not that good. I would like uniformity as I
would expect in OCG 825 or Shipley 1818. Q1: what Should I expect for
uniformity. Q2: are there any key points in the application of the PR
that you can share. THANKS