Looking for "PR Spray Coating equipment and supplier"
Cheol-Hyun Han
1998-03-26
Hi;
I'm looking for the "Spray Coating method of Photoresist" because I need
to coat PR into deep and big cavity on Silicon wafer(1.5mm deep and 2mm
radius in 2mm thich 3inch wafer)
Does anybody know the spray coating method for photoresist coating and
equipment and vendor which is needed? Any information would be welcomed.
Thank you.