Re: Looking for polymer films as etching mask against acid
jonathan d trumbull
1998-03-26
Cheol-Hyun,
> Does anybody know other kinds of polymer films which has good adhesion
> with silicon in acid or the way to increase the adhesion between
> polyimide or parylene and silicon?
The only way I have been able to get polyimide and PR to stick during a
HF:HNO3 etch is to use an adhesion layer of Cr. Just a 10-20 nm works
fine. If you can't use this for whatever reason, you might be out of
luck.
--Jonathan