Some Questions About Material Efficiency In Sputtering
And E-Beam Evalporation
Abbas Abbaspour-Tamijani
2005-02-06
I am writing a proposal and need to get an estimate of how much gold we need to
buy for our process. Does anybody know answer to some of these questions:
1- Do you think a 2" sputtering targets give good enough uniformity for a 3"
wafer, or we will have to resort to 3" or 4" targets?
2- How can we get a rough estimate of how many 0.5um sputtering runs are
possible out of a 4"X1/8" gold target (nearly 25cc or 466g)?
3- How about efficiency of e-beam evaporation, how can I calculate the amount of
gold that is consumed to deposit a film of 0.5 um thickness?
Thanks for your help.