Re: Silicon/Pyrex Pattern Alignment! Need advices!
Marco Doms
2005-02-08
Badin,
depending on the equipment available, the solution for your problem can be
quite simple:
As you have already assumed, you will need an aligner with an IR-Camera
and an IR light source below the wafer. It is quite astonishing how well
this works even with barely processed Pyrex wafers.
Regards,
Marco