Isotropic Plasma Etch for Removing Sacrificial
Photoresist La...
BobHendu@aol.com
2005-03-18
Jordan:
Have you tried a downstream asher like a Gasonics or Matrix system for this
process. Either process is very isotropic but I don't know how much 10 microns
it will actually undercut. I have a Gasonics 3510 system set up and I could
process some wafers for you but you would have to send them by next week and
they can have no gold on the substrate. Call me at 602-206-6154 for further
details. Bob Henderson