how to prevent the natural oxide formation
onpoly-Sifilm for tr
BobHendu@aol.com
2005-03-21
I agree with Pierre. It is very difficult to prevent oxidation in transport.
In addition, outgassing from various plastics used for shipping can also
deposit unwanted materials on the surface. Depending on the next process step
it
might be helpful to do an argon sputter prior to a metal deposition or even
a single wafer ash using forming gas prior to the next process step. Bob
Henderson