How to smooth the surface of Si film that on glass?
李广波
2005-03-24
Hi all,
We are considering thermal oxidation polishing(oxidize silicon and denude
oxide...), but the temperature can only be 700 degrees because the silicon film
is on a substrate of glass. Does it work under that low temperature? Are there
any other ways to smooth the surface?
I'm looking forward to your reply. Thanks in advance.
Guangbo Li