Hello Vinny,
I am not sure if this can help you but here is some information.
You may be able to spin on a glass film of any thickness from zero to 5000
angstroms and possibly thicker.
These films can be similar to a thermal oxide but not as dense and they are
available with different methyl, phenyl or other organic groups in the
polymeric structure. These glasses may be spun on and baked usually 80,
150, and 250 deg c for ! minute then further densified at 400c in Nitrogen.
The solvent in these solutions is usually an alcohol ketone mixture.
Perhaps this can help as it is an organosilane structure like you are
interested in.
If you have further interest and wish to know where to obtain these
materials please mail me and I can provide some names.
Sincerely, Neal
At 12:05 AM 4/8/2005 -0700, you wrote:
>I was wondering if anyone knows how to make PDMS thin films (1000
>nm thickness)??? I'm trying to use them for cantilever structures. Thank
>you.