We have sucessfully bonded pyrex 7740 and borofloat glasses to bare
silicon wafer many times (so we have the equipment and some
understanding). We are now developing a process which requires attaching
pyrex 7740 glass to an oxidized silicon wafer. The oxide will be 200nm
or so thick. Does anyone have experience with this type of anodic
bonding? Is it possible? Any suggestions?
Thanks,
Charles Ellis....
Auburn University