Hello Everyone,
Has anyone seen Pure nickel react with pecvd oxide after a several hundred
degrees C anneal? I have 250A of Pure Nickel sputtered onto 6000A of pecvd
oxide and after the anneal step I have what appears to be dendritic
structures(sort like ice crystals). I have tried to etch off this top layer
using standard nickel etching processes, but the film is not attacked. I am
clueless at this point so any suggestions would be appreciated.
Thankyou,
James Vaughn