Any one knows how to patten AZ4620 with high aspect
ratio?
Yi Zhao
2005-05-18
I want to pattern 2 micron holes array (center to center distance for
neighboring holes is 4 micron) on 8 micron thick AZ4620. I prefer a near
vertical sidewall profile of the resist. Does any one has experience on it, or
any suggestion?
Thanks,
YiYi Zhao
Laboratory for MicrosystemsTechnology
Boston University