I am trying to use ZnO (amorphous) as a sacrificial layer.
Does anyone know whether this ZnO will be crystallized if it goes through a high
temperature post process? (say 1100 C).
The melting temperature of the ZnO is, I believe, around 1700 C. This makes me
think the structure shouldn't be changed into crystal structure but I'm just not
so
sure.
If the structure do or may get crystallized, will it be still etchable in an
acid
solution?
Sincerely,
Kee Ryu