Hi,
Im trying to find information on Spin on glass (SOG). I need to use it as a
dielectric layer which i should be able to pattern using normal positive photo-
resist and etch back (say using HF). The maximum thickness i need to go is about
2-3 um. Any suggestions of other patternable dielectric material is also
welcome. The vendors i have contacted have posed a limitation on thickness on
SOG due to films cracking at higher thickness/temp.
thank you,
krishna