You could try a sacrificial gold layer sputtered in a SEM coater, or
possibly try SU8 under that may work
Dr. Michael Cooke
Microsystems Technology Group
School Of Engineering
University of Durham
----- Original Message -----
From: "erkin seker"
Subject: [mems-talk] Polyimide Release Agent
> Is anybody aware of a release agent for polyimide films? I would like to
> spin the polyimide onto a wafer, pattern it, and then peel it off intact.
> I would greatly appreciate any help.