Hello,
If this can help, a quick curve fitting using Maryla numbers gives:
Y = 90.752 ((X)^(-0.5031))
With an R^2 = 1
Y=thickness
X=rotation velocity
Farid
-----Original Message-----
From: maryla krolikowska
Subject: Re: [mems-talk] AZ 5214E layer thickness in spin-coating process
rpm thickness in imc
2000 1.98
3000 1.62
4000 1.40
5000 1.25
6000 1.14
Maryla